Products

Enabling chip production at scale

The semiconductor industry is driven by affordable scaling, which is powered by ASML’s holistic lithography product portfolio

We provide our customers with everything they need – hardware, software and services – to mass produce patterns on silicon, allowing them to increase the value and lower the cost of a chip.

Lithography systems

Refurbished systems

Almost every lithography system that we’ve ever shipped is still in use at a customer fab. We refurbish ‘classic’ PAS 5500 and TWINSCAN lithography systems for a new life and a new purpose.


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NXE3400 metrology

Metrology & inspection systems

Delivering speed and accuracy, our metrology and inspection portfolio covers every step manufacturing processes, from R&D to mass production.


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Computational lithography

ASML is pioneering this industry-leading technique, which minimizes the physical and chemical effects that interfere with the quality of a chip.


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Customer support

At ASML, the customer always comes first. With more than 5,000 customer support employees, including service engineers and applications specialists, we make sure our systems in our customers’ fabs are running smoothly.


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